HISTORICAL-PERSPECTIVE OF ORIENTED AND EPITAXIAL THIN-FILMS

Over the years, vacuum techniques for both oriented and epitaxial film growth, and also for device processing, have played a critical role i n the evolution of advanced solid-state components. The American Vacuu m Society, through its symposia and publishing activities, has contrib uted greatly to this progress. The history of organizational and techn ical factors that have impacted on these developments is summarized, a nd selected examples of unique epitaxial metallic, semiconductor and f erroelectric device structures are discussed.