PRELIMINARY SOFT-X-RAY STUDIES OF BETA-SIC

Citation
Ml. Shek et al., PRELIMINARY SOFT-X-RAY STUDIES OF BETA-SIC, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1079-1084
Citations number
28
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
12
Issue
4
Year of publication
1994
Part
1
Pages
1079 - 1084
Database
ISI
SICI code
0734-2101(1994)12:4<1079:PSSOB>2.0.ZU;2-F
Abstract
We have looked at beta-SiC with soft x-ray emission and photoemission spectroscopy. From the Si L23 and C K emissions, the Si s + d-like and C p partial density of states in the bulk valence band are identified and compared with valence band photoemission. In addition to bulk ele ctronic structural features, photoemission from a (3 X 2) Si-rich surf ace shows two surface-derived valence features at approximately - 2.6 and approximately - 1.6 eV relative to the Fermi level. The intensitie s of these valence features vary as those of surface Si 2p core level components shifted by - 0.5 and - 1.4 eV from the bulklike SiC Si 2p c ore level. We have also used the Si L23 absorption edge as a probe of the unfilled states near the conduction band minimum.