S. Ichimura et al., PRESSURE MEASUREMENT BY LASER IONIZATION - DIRECT COUNTING OF GENERATED IONS BY IMAGING OF THEIR SPATIAL-DISTRIBUTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1734-1739
Citations number
11
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
The spatial distribution of ions generated by nonresonant multiphoton
ionization of Xe and H-2 with second harmonics of a picosecond YAG las
er was imaged with a new detection system. Ions were observed as brigh
t spots on a microchannel plate (MCP) intensifier, and they appeared o
n a straight line, reflecting the ion generation along a laser beam pa
th. The size of the ionization region, which has a spindle shape, was
estimated from the image. The maximum diameter of the ionization regio
n was approximately 60 mum, and the length was 3.6 mm for a Xe gas pre
ssure of 5 X 10(-5) Pa and an incident laser energy of 10 mJ/pulse for
our measurement system. The size depended on the incident laser energ
y, and on the lens assembly used for the focusing of the laser beam. T
he possibility of relative pressure measurement by counting of the bri
ght spot on the MCP intensifier was also investigated.