F. Sakurai et al., LIQUID-PHASE EPITAXIAL P-TYPE ZNSE GROWTH FROM A SE SOLUTION AND FABRICATION OF PN JUNCTIONS WITH DIFFUSED N-TYPE LAYERS, Journal of crystal growth, 172(1-2), 1997, pp. 75-82
High concentration p-type epitaxial ZnSe layers are grown by the tempe
rature difference method under controlled Zn vapor pressure (TDM-CVP)
liquid phase epitaxy (LPE) from a Se solution. The hole concentration
of the epitaxial layers grown at 950 degrees C under a Zn vapor pressu
re of 3.0 atm increases with increasing the amount of Na(2)e until 0.5
x10(-2) mol% in Se solution but decreases with an amount of Na2Se abov
e 0.5x10(-2) mol%. The decrease of the hole concentration is related t
o the appearance of a luminescence band with a peak at 2.696 eV in the
CL spectra. These trends are in accordance with Na2S- or LiN3-doped e
pitaxial layers. Na2Se-doped ZnSe layers show a high carrier concentra
tion(p(max)approximate to 1x10(18) cm(-3)) and an almost undetectable
deep level luminescence but an inhomogeneous surface morphology with m
any interrupted growth areas. On the other hand, Na2S- or LiN3-doped Z
nSe layers show a relatively low carrier concentration (<10(17) cm(-3)
) but an almost undetectable deep lever luminescence and a homogeneous
surface morphology with macrosteps. Photocapacitance measurements are
applied to LiN3-doped p-type epitaxial layers and revealed dominant d
eep levels at E(v)+2.55 eV, which are suggested to compensate shallow
accepters. pn junction diodes are fabricated by Ga diffusion for n-typ
e layers from a Zn solution into the Na2S-doped p-type epitaxial ZnSe
layer and they emit pure blue light with a wavelength of 471 nm at roo
m temperature.