VOLTAGE-CONTRAST SCANNING PROBE MICROSCOPY

Authors
BLOOM DM
Citation
Dm. Bloom, VOLTAGE-CONTRAST SCANNING PROBE MICROSCOPY, Microelectronic engineering, 24(1-4), 1994, pp. 3-9
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
24
Issue
1-4
Year of publication
1994
Pages
3 - 9
Database
ISI
SICI code
0167-9317(1994)24:1-4<3:VSPM>2.0.ZU;2-L
Abstract
A scanning force microscope for measuring ultrafast voltage signals is demonstrated. The new technique is based on mixing due to the square- law force interaction present between the microscope tip and sample. E xamples of time-resolved measurements on VLSI and MMIC devices are giv en.