PHOTOTHERMAL CHARACTERIZATION OF SOLIDS AND THIN-FILMS BY OPTICAL ANDSCANNING PROBE TECHNIQUES

Authors
OESTERSCHULZE E STOPKA M KASSING R
Citation
E. Oesterschulze et al., PHOTOTHERMAL CHARACTERIZATION OF SOLIDS AND THIN-FILMS BY OPTICAL ANDSCANNING PROBE TECHNIQUES, Microelectronic engineering, 24(1-4), 1994, pp. 107-112
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
24
Issue
1-4
Year of publication
1994
Pages
107 - 112
Database
ISI
SICI code
0167-9317(1994)24:1-4<107:PCOSAT>2.0.ZU;2-U
Abstract
To investigate thermal parameters of solids and thin films on a macros copic as well as on a microscopic scale, photo-thermal analysis techni ques were implemented using optical (interferometry, infrared-radiomet ry) and scanning probe techniques (STM, scanning thermal microscope ST hM).