HIGH-VOLTAGE RESOLUTION WITH A LASER-DIODE BASED ELECTROOPTIC MEASUREMENT SYSTEM

Authors
BAUR G HOFMANN R SOLKNER G PFLEIDERER HJ
Citation
G. Baur et al., HIGH-VOLTAGE RESOLUTION WITH A LASER-DIODE BASED ELECTROOPTIC MEASUREMENT SYSTEM, Microelectronic engineering, 24(1-4), 1994, pp. 393-400
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
24
Issue
1-4
Year of publication
1994
Pages
393 - 400
Database
ISI
SICI code
0167-9317(1994)24:1-4<393:HRWALB>2.0.ZU;2-K
Abstract
A laser diode based measurement system with low invasiveness for the d etection of fast electrical waveforms on lines in integrated circuits has been developed. The system employs an external electro-optic cryst al sensor with a reference electrode for calibrated amplitude measurem ents. Its high voltage sensitivity of 2 mV/square-root Hz and high tem poral resolution are demonstrated by measurements of a FM-IF-demodulat or circuit and CMOS handshake circuits.