J. Diaz et al., STM STUDIES OF SI AND C EVAPORATION ON SI(111) AT RT BY LASER-ABLATION, Microscopy microanalysis microstructures, 5(1), 1994, pp. 57-59
Silicon and carbon have been deposited on Si (111) under UHV by means
of the pulsed laser evaporation technique. The evaporated species cont
ain ions of kinetic energies as high as 2 KeV for Si and 800 eV for C,
i.e. much higher than in thermal evaporation. STM images of about 0.0
1 deposited monolayers reveal that some damage is produced on the subs
trate. The damaged areas consist mainly in monoatomic vacancies of the
so called adatoms, displaced adatoms and agglomerates of vacancies.