V. Vasudevan et J. Vasi, A 2-DIMENSIONAL NUMERICAL-SIMULATION OF OXIDE CHARGE BUILDUP IN MOS-TRANSISTORS DUE TO RADIATION, I.E.E.E. transactions on electron devices, 41(3), 1994, pp. 383-390
We have developed a time-dependent two-dimensional simulator in order
to simulate charge trapping in silicon dioxide due to radiation. The P
oisson and continuity equations are solved both in the oxide and the s
emiconductor. In addition, in order to simulate charge trapping, trap
rate equations using first-order trapping kinetics are solved in the o
xide. This paper contains the numerical methods used in the simulation
and results obtained using this simulator. One of the main results of
this simulation is the presence of a lateral variation in the radiati
on-induced oxide charge in an MOS transistor irradiated with a drain b
ias.