F. Durst et al., ADVANCED MATHEMATICAL-MODELS FOR SIMULATION OF RADIATIVE HEAT-TRANSFER IN CVD REACTORS, Journal of crystal growth, 172(3-4), 1997, pp. 389-395
The effect of radiative heat transfer, in horizontal chemical vapor de
position reactors, on the upper wall temperature and the formation of
parasitic GaAs and As deposits is studied in detail. A multi-band mode
l is developed, including the interference of thermal radiation. It is
shown that the interference phenomenon leads to a significant additio
nal decrease of the wall temperature that, in turn, results in a subst
antial diminution of the deposition rate of the GaAs layer. The As fil
m deposited on the reactor wall results in a more significant decrease
of the wall temperature, of about 130 K.