PHASE-CHANGES IN TITANIUM FILMS ON SILICON DURING LASER TREATMENT IN AROMATIC-HYDROCARBONS

Authors
SHIBKO AN
Citation
An. Shibko, PHASE-CHANGES IN TITANIUM FILMS ON SILICON DURING LASER TREATMENT IN AROMATIC-HYDROCARBONS, Inorganic materials, 30(3), 1994, pp. 349-351
Citations number
6
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
30
Issue
3
Year of publication
1994
Pages
349 - 351
Database
ISI
SICI code
0020-1685(1994)30:3<349:PITFOS>2.0.ZU;2-C