FORMATION OF THE ALTERED LAYER IN SILICON DURING RF REACTIVE SPUTTERING

Authors
GALDIKAS A GRIGONIS A PRANEVICIUS L VOSYLIUS J
Citation
A. Galdikas et al., FORMATION OF THE ALTERED LAYER IN SILICON DURING RF REACTIVE SPUTTERING, Solid-state electronics, 37(11), 1994, pp. 1891-1895
Citations number
17
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid-state electronics → ACNP
ISSN journal
00381101
Volume
37
Issue
11
Year of publication
1994
Pages
1891 - 1895
Database
ISI
SICI code
0038-1101(1994)37:11<1891:FOTALI>2.0.ZU;2-Z