MAIN FEATURES OF ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE VACUUM-SYSTEMS

Authors
Citation
J. Pivarc, MAIN FEATURES OF ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE VACUUM-SYSTEMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2716-2722
Citations number
23
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
12
Issue
5
Year of publication
1994
Pages
2716 - 2722
Database
ISI
SICI code
0734-2101(1994)12:5<2716:MFOEIV>2.0.ZU;2-0
Abstract
This article presents the main features in the design of vacuum system s for electron cyclotron resonance (ECR) ion sources. It is very inter esting to consider them as a possible source of high-charge-state ions in upgrading present heavy-particle accelerators. Scaling relationshi ps are given as a basis for understanding the vacuum configurations of ECR ion sources. The relevance of gas desorption effects to vacuum eq uilibrium and stability is also pointed out. Ion-induced pressure inst ability, a model of hydrogen diffusion, and the influence of neutral g ases on the vacuum stability of ECR ion sources are discussed.