J. Pivarc, MAIN FEATURES OF ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE VACUUM-SYSTEMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2716-2722
Citations number
23
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
This article presents the main features in the design of vacuum system
s for electron cyclotron resonance (ECR) ion sources. It is very inter
esting to consider them as a possible source of high-charge-state ions
in upgrading present heavy-particle accelerators. Scaling relationshi
ps are given as a basis for understanding the vacuum configurations of
ECR ion sources. The relevance of gas desorption effects to vacuum eq
uilibrium and stability is also pointed out. Ion-induced pressure inst
ability, a model of hydrogen diffusion, and the influence of neutral g
ases on the vacuum stability of ECR ion sources are discussed.