INVESTIGATION OF THE ENERGY-TRANSFER TO THE SUBSTRATE DURING TITANIUMDEPOSITION IN A HOLLOW-CATHODE ARC

During titanium layer deposition with a hollow cathode arc discharge t he integral energy influx to the substrate has been monitored by measu ring temperature gradients. Discharge power and substrate voltage have been varied. Simultaneously, the plasma parameters in front of the su bstrate were determined by means of Langmuir-probe measurements. From the integral energy influx and the plasma parameters the contributions of the charge carriers and the heat radiation to the substrate heatin g were calculated. The contribution of the titanium condensation heat could be estimated by means of Rutherford backscattering and ellipsome trical measurements. It was found that heat radiation and charge carri ers mainly contribute to the integral substrate heating. The contribut ion of condensation can be neglected.