S. Hattori et al., MOLECULAR-BEAM EPITAXY CELL OPTIMIZED FOR ORGANIC-COMPOUNDS AND PREPARATION OF A CU PHTHALOCYANINE THIN-FILM, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2784-2789
Citations number
16
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
We have established a dry process based on molecular beam epitaxy (MBE
) of organic molecules under ultrahigh vacuum (UHV) condition on a cle
an and bare silicon surface. We designed a new MBE system suited to de
positing organic materials based on the Monte Carlo simulation of the
molecular motion. Cu phthalocyanine thin films were prepared with the
system as a test. Films with high flatness and crystallinity without c
ontamination were prepared on the substrates prepared by the UV/HF met
hod10 developed earlier in our research group. The possibility of cont
rolling the crystal structure of the deposited thin film by the surfac
e crystallinity of the substrate is suggested based on the observation
on differently prepared substrate surfaces.