MOLECULAR-BEAM EPITAXY CELL OPTIMIZED FOR ORGANIC-COMPOUNDS AND PREPARATION OF A CU PHTHALOCYANINE THIN-FILM

We have established a dry process based on molecular beam epitaxy (MBE ) of organic molecules under ultrahigh vacuum (UHV) condition on a cle an and bare silicon surface. We designed a new MBE system suited to de positing organic materials based on the Monte Carlo simulation of the molecular motion. Cu phthalocyanine thin films were prepared with the system as a test. Films with high flatness and crystallinity without c ontamination were prepared on the substrates prepared by the UV/HF met hod10 developed earlier in our research group. The possibility of cont rolling the crystal structure of the deposited thin film by the surfac e crystallinity of the substrate is suggested based on the observation on differently prepared substrate surfaces.