Pj. Abbott et P. Looney, INFLUENCE OF THE FILAMENT POTENTIAL WAVE-FORM ON THE SENSITIVITY OF GLASS-ENVELOPE BAYARD-ALPERT GAUGES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2911-2916
Citations number
11
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Nonlinearities of approximately 10%-15% in the sensitivity of glass en
velope Bayard-Alpert gages (BA gages) have been observed in the pressu
re range 10(-7)-10(-2) Pa. These nonlinearities were studied in modifi
ed BA gage tubes with platinum coatings on their inner glass surfaces
by measuring the equilibrium potential of the platinum coating as a fu
nction of pressure. The sensitivities of the gage systems (gage tube p
lus controller) were found to depend on the inner surface potential, a
nd this potential was found to depend on pressure and on the details o
f the filament potential waveform provided by the gage controller. It
was found that the nonlinearities could be minimized by holding the in
ner surface to a fixed direct-current (dc) potential, by modifying the
alternating-current filament potential wave form, or by using a contr
oller that provides a noise-free dc filament-heating current.