INFLUENCE OF THE RATIO OF THE ELECTRON TEMPERATURES AT THE ELECTRODESON THE CURRENT OSCILLATIONS IN A RADIOFREQUENCY PLASMA REACTOR

Authors
DEUTSCH R ERZ U POHLE M RAUCHLE E SCHWARZ J
Citation
R. Deutsch et al., INFLUENCE OF THE RATIO OF THE ELECTRON TEMPERATURES AT THE ELECTRODESON THE CURRENT OSCILLATIONS IN A RADIOFREQUENCY PLASMA REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2936-2937
Citations number
3
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
12
Issue
5
Year of publication
1994
Pages
2936 - 2937
Database
ISI
SICI code
0734-2101(1994)12:5<2936:IOTROT>2.0.ZU;2-#
Abstract
Based on electric circuits for radio-frequency plasma reactors it is s hown numerically that not only the mean electron density and the mean electron temperature can be determined from the discharge current as d escribed in R. J. Seebock, R. Deutsch, and E. Rauchle, J. Vac. Sci. Te chnol. A 11, 682 (1993), but also the ratio of the mean electron tempe ratures in the electrode boundary sheaths can be estimated.