MAGNETRON SPUTTER EPITAXY AND CHARACTERIZATION OF INSB IN(1-X)AL(X)SBSTRAINED-LAYER SUPERLATTICES/

Strained layer superlattices of InSb/In1-xAl(x)Sb with 0 < x < 0.5 hav e been grown on (001)InSb by magnetron sputter epitaxy. The crystallin e quality and interface sharpness of the superlattice layers, evaluate d by X-ray diffraction, Raman spectroscopy, and transmission electron microscopy were found to be comparable to the best results obtained fo r other III-V material systems when grown by molecular beam epitaxy. I t is demonstrated that magnetron sputter epitaxy allows precise contro l of the composition of the layers and layer thicknesses with excellen t reproducibility.