STUDY ON THE MECHANISM OF ALUMINUM NITRIDE SYNTHESIS BY CHEMICAL-VAPOR-DEPOSITION

Authors
LI CZ HU LM YUAN WK CHEN MH
Citation
Cz. Li et al., STUDY ON THE MECHANISM OF ALUMINUM NITRIDE SYNTHESIS BY CHEMICAL-VAPOR-DEPOSITION, Materials chemistry and physics, 47(2-3), 1997, pp. 273-278
Citations number
16
Categorie Soggetti
Material Science
Journal title
Materials chemistry and physics → ACNP
ISSN journal
02540584
Volume
47
Issue
2-3
Year of publication
1997
Pages
273 - 278
Database
ISI
SICI code
0254-0584(1997)47:2-3<273:SOTMOA>2.0.ZU;2-P
Abstract
Ultrafine aluminum nitride particles were synthesized by chemical vapo r deposition at 973-1273 K. Effects of reaction temperature, gas total how rate, aluminum chloride concentration on aluminum nitride particl e morphology and particle size distribution were studied. The mechanis m of the reaction between aluminum chloride and ammonia and the mechan isms for homogeneous formation of aluminum nitride particles and growt h of aluminum nitride film by surface reactions were investigated.