TRANSMISSION ELECTRON-MICROSCOPY DETECTION OF MICROTEXTURE VARIATIONSAND THEIR EFFECTS ON THIN-FILM STABILITY

Authors
Citation
Ke. Harris et Ah. King, TRANSMISSION ELECTRON-MICROSCOPY DETECTION OF MICROTEXTURE VARIATIONSAND THEIR EFFECTS ON THIN-FILM STABILITY, Journal of electronic materials, 23(10), 1994, pp. 1035-1041
Citations number
18
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
ISSN journal
03615235
Volume
23
Issue
10
Year of publication
1994
Pages
1035 - 1041
Database
ISI
SICI code
0361-5235(1994)23:10<1035:TEDOMV>2.0.ZU;2-0
Abstract
We have studied grain growth and the development of preferred orientat ion in thin gold films using transmission electron microscopy conical dark field imaging. The technique is capable of detecting texture vari ations characterized by mean orientation differences smaller than 5-de grees. We have observed microscopic regions with distinct [111] fiber textures that differ, primarily, in the mean azimuthal deviation from the fiber axis. For one texture, the [111] axes of individual grains a re found to have an average deviation of 1.5-degrees from the foil nor mal, a second is characterized by a mean deviation of 5-degrees, and a third is more nearly random with only a slight [111] orientation pref erence. The shapes of the differently oriented regions depend on the p reparation of the sodium chloride substrate before deposition. We have studied the dependence of preferential orientation development on sub strate surface topography and the evolution of microstructure in diffe rently textured regions. Hillock growth, observed only in nearly rando mly oriented regions of the films, cannot be explained by current theo ries of grain growth or hillock formation.