Ke. Harris et Ah. King, TRANSMISSION ELECTRON-MICROSCOPY DETECTION OF MICROTEXTURE VARIATIONSAND THEIR EFFECTS ON THIN-FILM STABILITY, Journal of electronic materials, 23(10), 1994, pp. 1035-1041
We have studied grain growth and the development of preferred orientat
ion in thin gold films using transmission electron microscopy conical
dark field imaging. The technique is capable of detecting texture vari
ations characterized by mean orientation differences smaller than 5-de
grees. We have observed microscopic regions with distinct [111] fiber
textures that differ, primarily, in the mean azimuthal deviation from
the fiber axis. For one texture, the [111] axes of individual grains a
re found to have an average deviation of 1.5-degrees from the foil nor
mal, a second is characterized by a mean deviation of 5-degrees, and a
third is more nearly random with only a slight [111] orientation pref
erence. The shapes of the differently oriented regions depend on the p
reparation of the sodium chloride substrate before deposition. We have
studied the dependence of preferential orientation development on sub
strate surface topography and the evolution of microstructure in diffe
rently textured regions. Hillock growth, observed only in nearly rando
mly oriented regions of the films, cannot be explained by current theo
ries of grain growth or hillock formation.