BENEFITS OF ENERGY-FILTERING FOR ADVANCED CONVERGENT-BEAM ELECTRON-DIFFRACTION PATTERNS

Energy filtering is well known to have a dramatic effect on the appear ance of standard, zone-axis convergent beam electron diffraction patte rns. In this paper, the effects of energy filtering on some less-commo n types of CBED patterns are shown. In particular, the (002) and (402) quasi-forbidden reflections in silicon are investigated, and the effe cts of energy filtering demonstrated. The filtering of HOLZ excess lin es in large-angle zone-axis patterns is shown, as these patterns are o f interest for Debye-Waller factor determination. Filtered and unfilte red bright-field large-angle CBED (LACBED) patterns of aluminium are p resented along with EELS spectra to demonstrate the partial removal of inelastically scattered electrons due to the LACBED geometry.