SILICON CRYSTAL-LATTICE AS AN ATOMIC LENG TH SCALE

Citation
J. Stumpel et P. Becker, SILICON CRYSTAL-LATTICE AS AN ATOMIC LENG TH SCALE, TM. Technisches Messen, 61(10), 1994, pp. 371-375
Citations number
NO
Categorie Soggetti
Instument & Instrumentation
Journal title
ISSN journal
01718096
Volume
61
Issue
10
Year of publication
1994
Pages
371 - 375
Database
ISI
SICI code
0171-8096(1994)61:10<371:SCAAAL>2.0.ZU;2-9
Abstract
In many areas of science and technology, components manufactured with even higher precision are needed. Dimensional accuracies and surface q ualities are required whose tolerances are close to atomic dimensions. Measures for the determination of such small lengths are made availab le by nature of highest perfection. With x-ray interferometry atomic i nterspaces of the order of magnitude of a few fractions of one thousan d millionth of a meter with an accuracy, which for practical purposes can be selected at random, and transferred to other linear measuring s ystems.