In this paper we show the possibility to characterize the apex of meta
llic tips used for scanning tunneling microscopes by a nanometer large
structure of a silicon surface. Further, first results of a theoretic
al calculation will give an impression of the influence of the tip sha
pe on a measured profile. By such a calculation it is possible to dete
rmine some dependencies between sample structure, tip shape and distan
ce. This will allow to decide which kind of structure is useful for th
e determination of tip shape parameters. On the other side the applica
tion of a scanning tunneling microscope as tool for creating hills (8
nm diameter) and lines (6 nm wide) on nanometer scale will be shown. T
his is one method which allows the linkage of such structures to an at
omic lattice of a crystalline substrate.