NANOMETERSCALE LITHOGRAPHY WITH CHROMIUM ATOMS USING LIGHT FORCES

Authors
DRODOFSKY U STUHLER J BREZGER B SCHULZE T DREWSEN M PFAU T MLYNEK J
Citation
U. Drodofsky et al., NANOMETERSCALE LITHOGRAPHY WITH CHROMIUM ATOMS USING LIGHT FORCES, Microelectronic engineering, 35(1-4), 1997, pp. 285-288
Citations number
8
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
35
Issue
1-4
Year of publication
1997
Pages
285 - 288
Database
ISI
SICI code
0167-9317(1997)35:1-4<285:NLWCAU>2.0.ZU;2-6
Abstract
We have used neutral chromium atoms to write periodic nanometerscale s tructures in a direct way. We use the force exerted on the induced dip ole of the atom in the intensity gradient of an optical standing light field to focus an atomic beam onto a substrate. The generated pattern reflects the symmetry of the optical standing wave.