A process has been developed whereby nanoscale features can be easily
and uniformly transferred into a thermoplastic with the use of embossi
ng. Masters for the embossing procedure are made using electron beam l
ithography, dry etching and electroplating and with these dies feature
s as small as 60nm have been produced in the polymer cellulose acetate
. In addition, it is shown that the plastic cellulose acetate can be p
atterned using photolithography with sub 250nm UV light and that a con
junction of these two pattern transfer methods allows fabrication of m
ultiple layered plastic devices. An application for this two layer pro
cess is presented where sub micron features can be easily and controll
ably placed at the bottom of trenches, a normally very difficult proce
dure.