MICROMACHINED SELF-ALIGNED MICROLENS(SAM) FOR MICROCOLUMN ELECTRON-BEAM

Authors
LEE YJ KANG SH CHUN K
Citation
Yj. Lee et al., MICROMACHINED SELF-ALIGNED MICROLENS(SAM) FOR MICROCOLUMN ELECTRON-BEAM, Microelectronic engineering, 35(1-4), 1997, pp. 413-416
Citations number
7
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
35
Issue
1-4
Year of publication
1997
Pages
413 - 416
Database
ISI
SICI code
0167-9317(1997)35:1-4<413:MSMFME>2.0.ZU;2-7
Abstract
This paper presents a technique for fabricating Self-Aligned Microlens (SAM) for microcolumn electron beam lithography system. By mixing surf ace- and bulk- micromachining technology, microbridges were formed at both sides of silicon wafer symmetrically. The alignment error could b e controlled within a few micrometers and assembly processes were redu ced.