TECHNOLOGIES FOR THE FABRICATION OF CYLINDRICAL FINE LINE DEVICES

Authors
LULLO G ARNONE C GIACONIA CG
Citation
G. Lullo et al., TECHNOLOGIES FOR THE FABRICATION OF CYLINDRICAL FINE LINE DEVICES, Microelectronic engineering, 35(1-4), 1997, pp. 417-420
Citations number
11
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
35
Issue
1-4
Year of publication
1997
Pages
417 - 420
Database
ISI
SICI code
0167-9317(1997)35:1-4<417:TFTFOC>2.0.ZU;2-W
Abstract
A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps fro m metal coating to final etching, with resolution in the 5 mu m range.