LARGE-AREA MULTILAYERED ELECTRODE ARRAYS FOR DIELECTROPHORETIC FRACTIONATION

A technique is presented for the fabrication of large-area (20x20mm) m ultilayered electrode structures with 10 mu m feature size. This techn ique has been used in the fabrication of 1000-electrode arrays powered by a series of interconnected bus-bars with quadrature-phased AC powe r supplies. These electrodes generate a travelling electric field whic h induces an asynchronous electrostatic linear force Travelling Wave D ielectrophoresis - which can propel particles of micron to submicron s cale and can be used for fractionation of subpopulations of such parti cles according to their dielectric properties.