THEORETICAL AND EXPERIMENTAL INVESTIGATIONS ON COULOMB INTERACTIONS IN A 2-LENS FOCUSED ION-BEAM INSTRUMENT

Authors
BI J JIANG XR KRUIT P
Citation
J. Bi et al., THEORETICAL AND EXPERIMENTAL INVESTIGATIONS ON COULOMB INTERACTIONS IN A 2-LENS FOCUSED ION-BEAM INSTRUMENT, Microelectronic engineering, 35(1-4), 1997, pp. 439-442
Citations number
11
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
35
Issue
1-4
Year of publication
1997
Pages
439 - 442
Database
ISI
SICI code
0167-9317(1997)35:1-4<439:TAEIOC>2.0.ZU;2-8
Abstract
The impact of Coulomb effects on the resolution of a focussed ion beam instrument is demonstrated by making use of both theoretical and expe rimental approaches. The calculated probe size is in reasonable agreem ent with the measured probe size at different operation modes of the m achine. It is shown in this paper how the lens aberrations and Coulomb interactions play different roles at different magnifications and wha t the main problems in determining the probe size are.