NEW METHOD FOR FABRICATION OF AN ARRAY OF INDIVIDUALLY CONTROLLABLE MINIATURIZED ELECTROSTATIC LENSES

We have fabricated arrays of silicon membranes and structures such as silicon contact pads and interconnecting silicon-wires on borosilicate glass as carrier material and isolator. We propose a new method to al ign and assemble these basic modules to form electrostatic electron op tical components such as lenses and multipoles. This enables the fabri cation of arrays of mutually aligned e-beam microcolumns.