Vy. Bayankin et al., ROLE OF OXYGEN IN THE FORMATION OF SURFACE-LAYERS ON STEEL IMPLANTED WITH ARGON IONS, Inorganic materials, 32(12), 1996, pp. 1303-1305
The composition and structure of steel 20Kh13 implanted with argon ion
s at beam current densities from 10 to 50 mu A/cm(2) were studied by x
-ray photoelectron spectroscopy and reflection high-energy electron di
ffraction. At medium vacuum pressures, residual oxygen penetrates the
near-surface region, leading to the formation of multiphase oxide laye
rs. The thickness, composition, and structure of the oxide layer depen
d on implantation conditions.