EVIDENCE OF A NEW PHASE-FORMATION (BATI4O9) BY BARIUM IMPLANTATION INTO TIO2

Barium ions of 140 keV energy were implanted at room temperature in Ti O2 (rutile) with a fluence of 10(17) ions cm(-2). Isochronal heat trea tments were carried out in air at 1000, 1100 and 1150 degrees C for 1 h. Rutherford backscattering spectrometry (RBS) in channeling geometry , X-ray diffraction at glancing incidence and X-ray photoemission spec troscopy (XPS) were undertaken to the physico-chemical characterizatio n of the implanted rutile. The annealing at 1150 degrees C leads to th e formation of a new phase which hae been identified as BaTi4O9 with a n average grain size of about 28 nm.