PHYSICAL LIMITS OF SUPERRESOLUTION LITHOGRAPHY

It call be shown, that it is not possible to increase the maximum tran sferable frequency in the aerial image of L/S-structures by superresol ution methods. However an increase in contrast yields a resolution imp rovement. The DOF is sufficiently large. In addition it is not possibl e to apply these superresolution methods without any changes to the im aging of isolated structures. In this case it is most important to hav e optical filters with a narrow PSF.