Se. Donnelly et al., SCANNING TUNNELING MICROSCOPY SYSTEM FOR THE STUDY OF SURFACES IRRADIATED WITH LOW-ENERGY IONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 141-147
An ultrahigh vacuum (UHV) operating scanning tunneling microscope (STM
) has been designed and built with the aim of studying surfaces irradi
ated with low energy ions. Because the low energy ion implanter was si
ted in a location remote from the STM laboratory, it was also necessar
y to design and build a portable vacuum system which was capable of in
terfacing with both the ion implanter and the STM chamber, and thus, e
ffect a sample transfer under UHV. This article presents a description
of the STM and a selection of recent research results which demonstra
te the capabilities of the system. In particular, the article reports
on the development of small-scale structures on graphite, platinum, an
d copper surfaces after irradiation with low-energy helium ions and on
the growth of copper islands formed by ion beam deposition on graphit
e substrates.