SCANNING TUNNELING MICROSCOPY SYSTEM FOR THE STUDY OF SURFACES IRRADIATED WITH LOW-ENERGY IONS

Citation
Se. Donnelly et al., SCANNING TUNNELING MICROSCOPY SYSTEM FOR THE STUDY OF SURFACES IRRADIATED WITH LOW-ENERGY IONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 141-147
Citations number
8
ISSN journal
10711023
Volume
11
Issue
2
Year of publication
1993
Pages
141 - 147
Database
ISI
SICI code
1071-1023(1993)11:2<141:STMSFT>2.0.ZU;2-N
Abstract
An ultrahigh vacuum (UHV) operating scanning tunneling microscope (STM ) has been designed and built with the aim of studying surfaces irradi ated with low energy ions. Because the low energy ion implanter was si ted in a location remote from the STM laboratory, it was also necessar y to design and build a portable vacuum system which was capable of in terfacing with both the ion implanter and the STM chamber, and thus, e ffect a sample transfer under UHV. This article presents a description of the STM and a selection of recent research results which demonstra te the capabilities of the system. In particular, the article reports on the development of small-scale structures on graphite, platinum, an d copper surfaces after irradiation with low-energy helium ions and on the growth of copper islands formed by ion beam deposition on graphit e substrates.