PHOTOREFLECTANCE CHARACTERIZATION OF GAAS AS A FUNCTION OF TEMPERATURE, CARRIER CONCENTRATION, AND NEAR-SURFACE ELECTRIC-FIELD

Citation
A. Badakhshan et al., PHOTOREFLECTANCE CHARACTERIZATION OF GAAS AS A FUNCTION OF TEMPERATURE, CARRIER CONCENTRATION, AND NEAR-SURFACE ELECTRIC-FIELD, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 169-174
Citations number
48
ISSN journal
10711023
Volume
11
Issue
2
Year of publication
1993
Pages
169 - 174
Database
ISI
SICI code
1071-1023(1993)11:2<169:PCOGAA>2.0.ZU;2-B
Abstract
Previous measurements of the photoreflectance line shape of GaAs at th e E1 transition (2-9 eV) were extended. This study covers the combined effect of temperature and carrier concentration along with a discussi on of the effect of the electric field intensity and the field inhomog eneity within a depth of 20 nm from the surface. A systematic study of changes in the line shape of the above band gap transition, E1 as a f unction of temperature (80-400 K) and carrier concentration (CC) (2-20 0 X 10(16) cm-3) is presented and a model of the effect is discussed. It was found that as the carrier concentration increases beyond 1 X 10 (17) cm-3, the line shape changes in phase and in broadening in a char acteristic way which depends on CC and temperature. A simple correlati on is established between both the broadening and the line shape rotat ion as a function of temperature and CC. Using the Schottky relation a nd Fermi-level pinning, the observed effect qualitatively was explaine d. Also the effect of near-surface electric field on the line shape is discussed. The observed effect may be applied as an optical measureme nt of the carrier concentration or possibly the electric field within a depth of congruent-to 20 nm from the surface/interface.