PROCEEDINGS OF THE 5TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE - 13-17 JULY 1992 HOTEL CHATEAU WILHELMINENBERG VIENNA, AUSTRIA

Authors
MITTERAUER J
Citation
J. Mitterauer, PROCEEDINGS OF THE 5TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE - 13-17 JULY 1992 HOTEL CHATEAU WILHELMINENBERG VIENNA, AUSTRIA, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 351-351
Citations number
NO
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
11
Issue
2
Year of publication
1993
Pages
351 - 351
Database
ISI
SICI code
1071-1023(1993)11:2<351:POT5IV>2.0.ZU;2-F