ION-SPACE-CHARGE INITIATION OF GATED FIELD EMITTER FAILURE

Citation
Ne. Mcgruer et al., ION-SPACE-CHARGE INITIATION OF GATED FIELD EMITTER FAILURE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 441-444
Citations number
15
ISSN journal
10711023
Volume
11
Issue
2
Year of publication
1993
Pages
441 - 444
Database
ISI
SICI code
1071-1023(1993)11:2<441:IIOGFE>2.0.ZU;2-V
Abstract
Failures of individual micron-scale gated field emitters are observed to be similar in many respects to cathodic arcs. The initiation of a f ailure event at elevated pressures by ion-space-charge enhancement of the electric field at the emitter tip is simulated and compared with e xperimental results. The experimental results show a significantly low er pressure failure threshold than that predicted by the simulation. T his discrepancy may indicate the presence of additional processes.