FABRICATION AND CHARACTERIZATION OF LATERAL CUSP-EDGE AND KNIFE-EDGE GEOMETRY CATHODES

Authors
KIM JM CARR WN ZETO RJ
Citation
Jm. Kim et al., FABRICATION AND CHARACTERIZATION OF LATERAL CUSP-EDGE AND KNIFE-EDGE GEOMETRY CATHODES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 459-463
Citations number
16
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
11
Issue
2
Year of publication
1993
Pages
459 - 463
Database
ISI
SICI code
1071-1023(1993)11:2<459:FACOLC>2.0.ZU;2-Z
Abstract
Two lift-off techniques are demonstrated to form lateral field emissio n cathodes by shadowing a sputter deposition for tungsten composite. A current of 26 muA is observed for ''knife-edge'' cathodes of 23 mum e dge length. The I-V characteristics are consistent with the Fowler-Nor dheim relationship. The effect of focusing electrodes for increasing a node collection efficiency is consistent with our electron trajectory tracing simulations. The fabrication process for these devices is desc ribed in detail.