Ca. Spindt et al., FIELD-EMITTER-ARRAY DEVELOPMENT FOR HIGH-FREQUENCY OPERATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 468-473
Power amplification at high frequencies is one of many applications un
der investigation using vacuum microelectronics technology. The result
s of an ongoing program to develop a gigahertz amplifier using Spindt-
type field-emitter arrays are reported. The maximum frequency at which
a field-emission source in the form of a Spindt-type cathode array ca
n be operated is determined by the capacitance of the structure and th
e transconductance of the array. It has been shown that by fabricating
arrays with high emitter-tip packing densities and small total areas
it should be possible to achieve operation in the gigahertz range. Str
uctures having a capacitance in the range of 0.1 pF have been fabricat
ed, and total emission currents of 25 mA with current densities of 100
0 A/cm2 have been demonstrated with a 0.1 pF structure having 625 emit
ter tips (40 muA/tip). The transconductance under these operating cond
itions was 500 mus or 0.8 muS/tip. Simultaneous experiments with our s
tandard low-frequency Spindt-type cathode geometry have shown that ave
rage emitter tip loadings of 200 muA/tip and transconductances of 5 mu
S/tip can be achieved. A 625-tip, 0.1-pF array with transconductance o
f 5 muS/tip would have a cutoff frequency of about 5 GHz. The factors
determining the capacitance and transconductance of the device and met
hods for improving performance are discussed.