Vk. Medvedev et al., ANGULAR AND ENERGY-DISTRIBUTIONS OF IONS EMITTED FROM A GALN LIQUID ALLOY ION-SOURCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 523-526
Angular distributions of Ga+, In+, and Cu+ ions from a GaIn liquid all
oy ion source are very different. With the source at room temperature,
In+ ions appear to be emitted into a narrow angular ring at the edge
of the Ga+ emission cone, and Cu+ ions are emitted into the central pa
rt of that cone. Energy distributions of Ga+ and In+ ions vary strongl
y as the source temperature increases, and at high temperatures depend
on the angle from the axis of the emission cone. A mechanism of space
separation of ions due to the difference of their evaporation fields
is proposed. The possible influence of charged droplet emission on the
angular and energy distributions of ions is discussed. A mechanism fo
r the optical radiation from a liquid metal ion source, due to charge-
exchange processes, is proposed.