ANGULAR AND ENERGY-DISTRIBUTIONS OF IONS EMITTED FROM A GALN LIQUID ALLOY ION-SOURCE

Citation
Vk. Medvedev et al., ANGULAR AND ENERGY-DISTRIBUTIONS OF IONS EMITTED FROM A GALN LIQUID ALLOY ION-SOURCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 523-526
Citations number
14
ISSN journal
10711023
Volume
11
Issue
2
Year of publication
1993
Pages
523 - 526
Database
ISI
SICI code
1071-1023(1993)11:2<523:AAEOIE>2.0.ZU;2-C
Abstract
Angular distributions of Ga+, In+, and Cu+ ions from a GaIn liquid all oy ion source are very different. With the source at room temperature, In+ ions appear to be emitted into a narrow angular ring at the edge of the Ga+ emission cone, and Cu+ ions are emitted into the central pa rt of that cone. Energy distributions of Ga+ and In+ ions vary strongl y as the source temperature increases, and at high temperatures depend on the angle from the axis of the emission cone. A mechanism of space separation of ions due to the difference of their evaporation fields is proposed. The possible influence of charged droplet emission on the angular and energy distributions of ions is discussed. A mechanism fo r the optical radiation from a liquid metal ion source, due to charge- exchange processes, is proposed.