PROPERTIES OF CAPACITIVE THIN-FILM HUMIDITY SENSORS

The paper deals with the-metrological analysis of capacitive thin-film humidity sensors based on a heuristic transient and failure response model. Characteristic quantities can be derived from the seperation of both dynamic and static and determined and stochastic parts of output voltage to create a comparing basis for the properties of these senso rs. The quantity of measurement errors caused by stochastic humidity s timulation will be shown. One of the investigated sensors shows a very determined transient response, which allows a dynamic correction as u sual in the case of temperature sensors.