DESIGN CONSIDERATION OF A DUAL-BEAM ESPI OPTICAL-SYSTEM FOR CONTOURING

Authors
DIAO H ZOU Y TIZIANI HJ
Citation
H. Diao et al., DESIGN CONSIDERATION OF A DUAL-BEAM ESPI OPTICAL-SYSTEM FOR CONTOURING, Optik, 93(2), 1993, pp. 45-51
Citations number
8
Categorie Soggetti
Optics
Journal title
Optik → ACNP
ISSN journal
00304026
Volume
93
Issue
2
Year of publication
1993
Pages
45 - 51
Database
ISI
SICI code
0030-4026(1993)93:2<45:DCOADE>2.0.ZU;2-B
Abstract
A discussion of the essential technical advantages, limitations, vario us kinds of errors and required characteristics of dual-beam illuminat ion ESPI optical system by tilting illuminations for contouring is att ached. Attractive features are the simplification of the optical syste m, the stationary reference contour planes and the possibility of adju sting various parameters for contouring.