PREEXPOSURE FOR 2D GRATINGS IN PHOTORESIST

Citation
P. Savander et Jt. Sheridan, PREEXPOSURE FOR 2D GRATINGS IN PHOTORESIST, Optik, 93(2), 1993, pp. 77-83
Citations number
66
Categorie Soggetti
Optics
Journal title
OptikACNP
ISSN journal
00304026
Volume
93
Issue
2
Year of publication
1993
Pages
77 - 83
Database
ISI
SICI code
0030-4026(1993)93:2<77:PF2GIP>2.0.ZU;2-J
Abstract
The applications and fabrication of two dimensional holographic gratin gs, recorded perpendicularly into UV-active positive photoresist are d iscussed. A new photoresist mixture with which it is easy to control t he coating layer thickness is presented and characterised. Three diffe rent exposure processes including sequential nonholographic and hologr aphic stages which allow greater control of the mediums response and t hreshold are investigated.