M. Sugimoto et al., SURFACE-EMITTING DEVICES WITH DISTRIBUTED BRAGG REFLECTORS GROWN BY HIGHLY PRECISE MOLECULAR-BEAM EPITAXY, Journal of crystal growth, 127(1-4), 1993, pp. 1-4
We realized extremely high absolute thickness controllability around /-0.3% in molecular beam epitaxy growth of distributed Bragg reflector
s, using a modified reflection high energy electron diffraction oscill
ation measurement technique. Very low threshold current density and hi
gh efficiency were obtained in InGaAs/AlGaAs surface emitting lasers b
y using this technique and a new periodically doped distributed Bragg
reflectors.