LONG-TERM STABILITY OF MBE PROCESS IN MMIC PRODUCTION

Authors
PAO YC FRANKLIN J BECHTEL NG
Citation
Yc. Pao et al., LONG-TERM STABILITY OF MBE PROCESS IN MMIC PRODUCTION, Journal of crystal growth, 127(1-4), 1993, pp. 58-61
Citations number
3
Categorie Soggetti
Crystallography
Journal title
Journal of crystal growth → ACNP
ISSN journal
00220248
Volume
127
Issue
1-4
Year of publication
1993
Pages
58 - 61
Database
ISI
SICI code
0022-0248(1993)127:1-4<58:LSOMPI>2.0.ZU;2-I
Abstract
Based on a four-year accumulated production data base of MESFETs, HBTs , HEMTs and PHEMTs for the uses of fabricating microwave monolithic in tegrated circuits (MMICs), a long term MBE process stability and repro ducibility are presented with a combined overall wafer yield of 75%.