M. Yoneta et al., LOW-TEMPERATURE MOLECULAR-BEAM EPITAXIAL-GROWTH OF ZNS GAAS(001) BY USING ELEMENTAL SULFUR SOURCE/, Journal of crystal growth, 127(1-4), 1993, pp. 314-317
We report successful growth of ZnS on GaAs(001) using elemental sulfur
and zinc sources. In order to use S, which has a very high vapor pres
sure for molecular beam epitaxy, a new type of effusion cell is develo
ped. The cell is composed of the effuser and post-heating zones. Not o
nly the control of vapor pressure, but also bakeout of the MBE chamber
could be achieved. ZnS/GaAs could be grown at temperatures as low as
150-degrees-C using S beam post-heated at 210-degrees-C and convention
al Zn beam. Low temperature photoluminescence shows that high quality
ZnS films are grown.