SN AND SB SEGREGATION AND THEIR POSSIBLE USE AS SURFACTANT FOR SHORT-PERIOD SI GE SUPERLATTICES/

The incorporation behaviour of antimony and tin in Ge was studied by m eans of Auger electron spectroscopy. By comparing the measured intensi ty ratios with a simple incorporation model, we find that Sn is strong er segregating than antimony. The activation energies are 0.34 and 0.2 7 eV, respectively. Using both materials in order to improve the inter face sharpness of short-period Si/Ge superlattices, we can show that a ntimony improves the superlattice structure up to growth temperatures of 600-degrees-C, while with tin the superlattice growth is destroyed.