Infrared absorption due to the localized vibrational modes of Si and B
e has been investigated in low temperature molecular beam epitaxial Ga
As. A spectrum from Si(Ga)-V(Ga) has been found, but pairing of Be(Ga)
was not detected. Anneals of the Si doped layers led to Si-site switc
hing and an apparent loss of silicon from solution. A comparison is ma
de with a previous study of neutron irradiated Si doped GaAs.