Sm. Shibli et al., ELECTRONIC-PROPERTIES OF MULTIPLE SI DELTA-DOPED GAAS-LAYERS GROWN BYMOLECULAR-BEAM EPITAXY AND MIGRATION-ENHANCED EPITAXY, Journal of crystal growth, 127(1-4), 1993, pp. 700-702
We report on comparative measurements of the electronic properties of
multiple Si delta-doped GaAs structures grown by conventional molecula
r beam epitaxy (MBE) and by migration-enhanced epitaxy (MEE) at a subs
trate temperature of 540-degrees-C. Samples were studied by Shubnikov-
De Haas and Hall measurements. Results suggest that for multiple delta
-doped samples grown at high substrate temperatures, MBE is a more eff
ective growth technique.