P. Krispin et al., DIRECT EVIDENCE FOR NATIVE POINT-DEFECTS IN MBE-GROWN ALAS GAAS HETEROSTRUCTURES/, Journal of crystal growth, 127(1-4), 1993, pp. 1073-1076
The n-isotype AlAs/GaAs interface is studied by capacitance/voltage te
chnique and deep-level transient spectroscopy in detail. It is found t
hat electrically active defects are present mainly on the AlAs side of
the inverted interface which lead to a strong depletion of carriers a
t the heterointerface. It is shown for the first time that arsenic vac
ancies (V(As)) and V(As)-related defects are formed during MBE growth
of the AlAs/GaAs heterostructure.